SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Configurable hot spot fixing system
Sturtevant, John L., Capodieci, Luigi, Kajiwara, Masanari, Kobayashi, Sachiko, Mashita, Hiromitsu, Aburada, Ryota, Furuta, Nozomu, Kotani, ToshiyaVolume:
9053
Year:
2014
Language:
english
DOI:
10.1117/12.2046272
File:
PDF, 6.94 MB
english, 2014