SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 23 February 2014)] Design-Process-Technology Co-optimization for Manufacturability VIII - Configurable hot spot fixing system

Sturtevant, John L., Capodieci, Luigi, Kajiwara, Masanari, Kobayashi, Sachiko, Mashita, Hiromitsu, Aburada, Ryota, Furuta, Nozomu, Kotani, Toshiya
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Volume:
9053
Year:
2014
Language:
english
DOI:
10.1117/12.2046272
File:
PDF, 6.94 MB
english, 2014
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