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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 14 April 2014)] Optical Micro- and Nanometrology V - Investigation of error compensation in CGH-based form testing of aspheres
Gorecki, Christophe, Asundi, Anand K., Osten, Wolfgang, Stuerwald, S., Brill, N., Schmitt, R.Volume:
9132
Year:
2014
Language:
english
DOI:
10.1117/12.2052968
File:
PDF, 2.72 MB
english, 2014