![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE NanoScience + Engineering - San Diego, California, United States (Sunday 17 August 2014)] Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII - Recent advances of the metrological AFM at INRIM
Postek, Michael T., Bellotti, R., Picotto, G. B.Volume:
9173
Year:
2014
Language:
english
DOI:
10.1117/12.2061954
File:
PDF, 328 KB
english, 2014