SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications - MEMS arrays for deformable mirrors
Krishnamoorthy, Raji, Bifano, Thomas G., Bailey, Wayne, Motamedi, M. Edward, Luo, Fang-ChenVolume:
2641
Year:
1995
Language:
english
DOI:
10.1117/12.220931
File:
PDF, 385 KB
english, 1995