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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - Dimension-temperature combination scaling for low-temperature 0.1micron CMOS
Masu, Kazuya, Yokoyama, Michio, Tsubouchi, Kazuo, Chen, Ih-Chin, Dixit, Girish A., Doan, Trung T., Sasaki, NobuoVolume:
2636
Year:
1995
Language:
english
DOI:
10.1117/12.221149
File:
PDF, 484 KB
english, 1995