SPIE Proceedings [SPIE San Dieg - DL Tentative - San Diego, CA (Sunday 1 July 1990)] X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography - Fabrication and performance at 1.33 nm of a 0.24-um period multilayer grating
Berrouane, H., Khan Malek, Chantal G., Andre, Jean-Michel, Lesterlin, L., Ladan, F. R., Rivoira, Jean-Rene, Lepetre, Yves, Barchewitz, Robert J., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1343
Year:
1991
Language:
english
DOI:
10.1117/12.23230
File:
PDF, 447 KB
english, 1991