SPIE Proceedings [SPIE Micromachining and Microfabrication '96 - Austin, TX (Monday 14 October 1996)] Micromachined Devices and Components II - Compatible CMOS microsystems for automotive and medical applications
Kersjes, Ralf, Mokwa, W., Chau, Kevin H., Roop, Ray M.Volume:
2882
Year:
1996
Language:
english
DOI:
10.1117/12.250703
File:
PDF, 2.61 MB
english, 1996