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SPIE Proceedings [SPIE BiOS '97, Part of Photonics West - San Jose, CA (Saturday 8 February 1997)] Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications - Microfabricated interlock system for precision alignment
Sabeti, Roya, Holl, Mark R., Altendorf, Eric H., Yager, Paul, Gourley, Paul L.Volume:
2978
Year:
1997
Language:
english
DOI:
10.1117/12.269975
File:
PDF, 629 KB
english, 1997