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SPIE Proceedings [SPIE Smart Structures and Materials '97 - San Diego, CA (Monday 3 March 1997)] Smart Structures and Materials 1997: Industrial and Commercial Applications of Smart Structures Technologies - Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment
Kajiwara, Kouichi, Hayatu, Masaki, Imaoka, Sizuo, Fujita, Takafumi, Sater, Janet M.Volume:
3044
Year:
1997
Language:
english
DOI:
10.1117/12.274670
File:
PDF, 793 KB
english, 1997