SPIE Proceedings [SPIE Microlithography '97 - Santa Clara, CA (Monday 10 March 1997)] Metrology, Inspection, and Process Control for Microlithography XI - Method to characterize overlay tool misalignments and distortions
Silver, Richard M., Potzick, James E., Scire, Fredric, Evans, Christopher J., McGlauflin, M., Kornegay, Edward, Larrabee, Robert D., Jones, Susan K.Volume:
3050
Year:
1997
Language:
english
DOI:
10.1117/12.275965
File:
PDF, 1.14 MB
english, 1997