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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Novel fabrication of comb actuator using RIE of polysilicon and (110) Si anisotropic bulk etching in KOH
Lim, Hyung-Taek, Kim, Yong-Kweon, Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324297
File:
PDF, 4.16 MB
english, 1998