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SPIE Proceedings [SPIE 18th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 16 September 1998)] 18th Annual BACUS Symposium on Photomask Technology and Management - In the year 2525, if x ray is still alive, if lithography can survive, they may find...
Nistler, John L., Michael, Mark, Hause, Fred N., Edwards, Richard D., Grenon, Brian J., Abboud, Frank E.Volume:
3546
Year:
1998
Language:
english
DOI:
10.1117/12.332840
File:
PDF, 1.05 MB
english, 1998