SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - High-power ultraviolet all-solid-state laser for industrial applications
Mehlmann, Christoph, Schroeder, Thomas, Klopp, Peter, Koch, R., Stamm, Uwe, Basting, Dirk, Dubowski, Jan J., Helvajian, Henry, Kreutz, Ernst-Wolfgang, Sugioka, KojiVolume:
3618
Year:
1999
Language:
english
DOI:
10.1117/12.352701
File:
PDF, 804 KB
english, 1999