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SPIE Proceedings [SPIE 1999 Symposium on Smart Structures and Materials - Newport Beach, CA (Monday 1 March 1999)] Smart Structures and Materials 1999: Smart Electronics and MEMS - CMOS integrated microsystems and nanosystems
Baltes, Henry, Brand, Oliver, Varadan, Vijay K.Volume:
3673
Year:
1999
Language:
english
DOI:
10.1117/12.354257
File:
PDF, 4.76 MB
english, 1999