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SPIE Proceedings [SPIE Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 12 June 2000)] Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Estimation of the displacement threshold energies in Si and GaAs by means of ion sputtering of structures with thin marker layers
Kharlamov, Vladimir S., Ber, Boris J., Trushin, Yuri V., Zhurkin, Evgeni E., Kovarski, Alexei P., Schmidt, Alexander A., Melker, Alexander I.Volume:
4348
Year:
2001
DOI:
10.1117/12.417661
File:
PDF, 352 KB
2001