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SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Prototype laser-activated bimetallic thermal resist for microfabrication
Sarunic, Marinko V., Chapman, Glenn H., Tu, Richard Y., Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
DOI:
10.1117/12.432509
File:
PDF, 2.42 MB
2001