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SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Electrochemical studies of electrodeposition of nickel for LIGA microstructures

Ding, Guifu, Zhang, Yi, Liu, Jingquan, Zhao, Xiaolin, Cai, Bingchu, Shen, Tianhui, Tien, Norman C., Huang, Qing-An
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Volume:
4601
Year:
2001
Language:
english
DOI:
10.1117/12.444706
File:
PDF, 119 KB
english, 2001
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