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SPIE Proceedings [SPIE International Symposium on Optoelectonics and Microelectronics - Nanjing, China (Wednesday 7 November 2001)] Micromachining and Microfabrication Process Technology and Devices - Novel silicon-micromachined gyroscope with high Q at atmosphere
Xiong, Bin, Wang, Yuelin, Che, Lufeng, Wang, Weiyuan, Tien, Norman C., Huang, Qing-AnVolume:
4601
Year:
2001
Language:
english
DOI:
10.1117/12.444719
File:
PDF, 237 KB
english, 2001