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SPIE Proceedings [SPIE Lasers in Metrology and Art Conservation - Munich, Germany (Monday 18 June 2001)] Recent Developments in Traceable Dimensional Measurements - Adaptive interferometric metrology system (AIMS) based on an interferometer employing a "common-path" optical configuration
Downs, Michael J., Decker, Jennifer E., Brown, NicholasVolume:
4401
Year:
2001
Language:
english
DOI:
10.1117/12.445612
File:
PDF, 368 KB
english, 2001