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SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Integrated circuit for SAW and MEMS sensors

Fischer, Wolf-Joachim, Koenig, Peter, Ploetner, Matthias, Hermann, Rudiger, Stab, Helmut, Bergmann, Neil W., Abbott, Derek, Hariz, Alex, Varadan, Vijay K.
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Volume:
4591
Year:
2001
Language:
english
DOI:
10.1117/12.449163
File:
PDF, 365 KB
english, 2001
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