SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] BioMEMS and Smart Nanostructures - Nanoscale fabrication using single-ion impacts
Millar, Victoria, Pakes, Chris I., Cimmino, Alberto, Brett, David, Jamieson, David N., Prawer, Steven D., Yang, Changyi, Rout, Bidhudutta, McKinnon, Rita P., Dzurak, Andrew S., Clark, Robert G., Kish,Volume:
4590
Year:
2001
Language:
english
DOI:
10.1117/12.454601
File:
PDF, 245 KB
english, 2001