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SPIE Proceedings [SPIE Photomask 2001 - Monterey, CA (Wednesday 3 October 2001)] 21st Annual BACUS Symposium on Photomask Technology - High transmittance attenuated phase shifting mask of chromium aluminum oxynitride
Choi, Eunchul, Kim, Eunah, Kim, Hyoungdo, Kim, Yong-Hoon, Tian, Huyong, No, Kwangsoo, Dao, Giang T., Grenon, Brian J.Volume:
4562
Year:
2002
Language:
english
DOI:
10.1117/12.458281
File:
PDF, 99 KB
english, 2002