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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Planarization of a CMOS die for an integrated metal MEMS
Lee, Hocheol, Miller, Michele H., Bifano, Thomas G., Yasaitis, John A., Perez-Maher, Mary Ann, Karam, Jean MichelVolume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.472803
File:
PDF, 331 KB
english, 2003