SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - Investigation of improving MEMS-type VOA reliability
Hong, Seok K., Tanner, Danelle M., Ramesham, Rajeshuni, Lee, Yeong G., Park, Moo Y.Volume:
5343
Year:
2004
Language:
english
DOI:
10.1117/12.524609
File:
PDF, 207 KB
english, 2004