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SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] Advanced Microlithography Technologies - Increasing post OPC layout verification coverage using a full-chip simulation based verification method
Hung, Chi-Yuan, Wang, Yangyuan, Yao, Jun-en, Wang, Yong Dong, Deng, Ze Xi, Progler, Christopher J., Gao, Gen Sheng, Fan, Ming HuiVolume:
5645
Year:
2004
Language:
english
DOI:
10.1117/12.572711
File:
PDF, 157 KB
english, 2004