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SPIE Proceedings [SPIE LAMILADIS '91: International Workshop--Laser Microtechnology and Laser Diagnostics of Surfaces - Chernovstsy, Ukraine (Tuesday 16 April 1991)] LAMILADIS '91 Intl Workshop: Laser Microtechnology and Laser Diagnostics of Surfaces - Control of spectrum of laser-induced periodical relief on GaAs surface in photochemical etching
Khudobenko, Alexander I., Panchenko, Vladislav Y., Popov, Vladimir K., Seminogov, Vladimir N., Koroteev, Nikolai I., Panchenko, Vladislav Y.Volume:
1723
Year:
1992
Language:
english
DOI:
10.1117/12.58627
File:
PDF, 286 KB
english, 1992