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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Geometrical analysis of product layout as a powerful tool for DFM (Invited Paper)
Roessler, Thomas, Liebmann, Lars W., Thiele, JoergVolume:
5756
Year:
2005
Language:
english
DOI:
10.1117/12.595062
File:
PDF, 288 KB
english, 2005