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SPIE Proceedings [SPIE Smart Structures and Materials - San Diego, CA (Sunday 6 March 2005)] Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology - Design, fabrication, and simulation of cantilever-type electrostatic micromechanical switch
Ostasevicius, Vytautas, Varadan, Vijay K., Dauksevicius, Rolanas, Tamulevicius, Sigitas, Bubulis, Algimantas, Grigaliunas, Viktoras, Palevicius, ArvydasVolume:
5763
Year:
2005
Language:
english
DOI:
10.1117/12.599111
File:
PDF, 344 KB
english, 2005