SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Design and Process Integration for Microelectronic Manufacturing III - Model-based verification for first time right manufacturing
Bruce, James A., Liebmann, Lars W., Conrad, Edward W., Dick, Gregory J., Nickel, D. John, Smolinski, Jacek G.Volume:
5756
Year:
2005
Language:
english
DOI:
10.1117/12.600552
File:
PDF, 755 KB
english, 2005