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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Emerging Lithographic Technologies IX - Indium tin oxide template development for step and flash imprint lithography
Gehoski, Kathleen A., Mackay, R. Scott, Resnick, Douglas J., Dauksher, William J., Nordquist, Kevin J., Ainley, Eric, McCord, Mark, Raphaelian, Mark, Hess, HaraldVolume:
5751
Year:
2005
Language:
english
DOI:
10.1117/12.606102
File:
PDF, 819 KB
english, 2005