SPIE Proceedings [SPIE Optics & Photonics 2005 - San Diego, California, USA (Sunday 31 July 2005)] Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II - 3D surface profilometry for both static and dynamic nanoscale full field characterization of AFM micro cantilever beams
Chen, Liang-Chia, Duparr½Á, Angela, Singh, Bhanwar, Fan, Kuang-Chao, Lin, Chi-Duen, Gu, Zu-Han, Chang, Calvin C., Kao, Ching-Fen, Chou, Jung-TsungVolume:
5878
Year:
2005
Language:
english
DOI:
10.1117/12.614683
File:
PDF, 833 KB
english, 2005