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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - Novel compact spectrophotometer for EUV optics characterization

Starke, K., Khounsary, Ali M., Morawe, Christian, Blaschke, H., Jensen, L., Nevas, S., Ristau, D., Lebert, R., Wies, C., Bayer, A., Barkusky, F., Mann, K.
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Volume:
6317
Year:
2006
Language:
english
DOI:
10.1117/12.686878
File:
PDF, 160 KB
english, 2006
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