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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Rules based process window OPC
O'Brien, Sean, Singh, Vivek K., Rieger, Michael L., Soper, Robert, Best, Shane, Mason, MarkVolume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.772790
File:
PDF, 481 KB
english, 2008