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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Shaping gate channels for improved devices
Gupta, Puneet, Singh, Vivek K., Rieger, Michael L., Kahng, Andrew B., Kim, Youngmin, Shah, Saumil, Sylvester, DennisVolume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.772889
File:
PDF, 254 KB
english, 2008