![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Electrically driven optical proximity correction
Banerjee, Shayak, Singh, Vivek K., Rieger, Michael L., Elakkumanan, Praveen, Liebmann, Lars W., Culp, James A., Orshansky, MichaelVolume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.790786
File:
PDF, 369 KB
english, 2008