SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging: Technology and Applications 2007 - Beijing, China (Sunday 9 September 2007)] International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing - Design and research of zoom optic system applied in micro-processing using 248nm KrF excimer laser
Liu, Xun, Zhou, Liwei, Chen, Tao, Zuo, Tie-chuanVolume:
6624
Year:
2007
Language:
english
DOI:
10.1117/12.791069
File:
PDF, 306 KB
english, 2007