SPIE Proceedings [SPIE Sixth International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 25 September 2007)] Sixth International Conference on Thin Film Physics and Applications - Growth and characterization of AlN thin films on free-standing diamond substrates
Huang, Jian, Xia, Yiben, Wang, Linjun, Liu, Jianmin, Xu, Jinyong, Hu, Guang, Zhu, XuefengVolume:
6984
Year:
2007
Language:
english
DOI:
10.1117/12.792638
File:
PDF, 506 KB
english, 2007