SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Langmuir probe applications in monitoring of plasma etching
Miakonkikh, Andrey V., Rudenko, Konstantin V., Orlikovsky, Alexander A., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802362
File:
PDF, 310 KB
english, 2012