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SPIE Proceedings [SPIE Scanning Microscopy 2010 - Monterey, California (Monday 17 May 2010)] Scanning Microscopy 2010 - Interlaboratory comparison of traceable atomic force microscope pitch measurements
Dixson, Ronald, Postek, Michael T., Newbury, Dale E., Chernoff, Donald A., Wang, Shihua, Platek, S. Frank, Joy, David C., Vorburger, Theodore V., Tan, Siew Leng, Orji, Ndubuisi G., Fu, JosephVolume:
7729
Year:
2010
Language:
english
DOI:
10.1117/12.858353
File:
PDF, 2.48 MB
english, 2010