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SPIE Proceedings [SPIE Photonics Asia 2010 - Beijing, China (Monday 18 October 2010)] Holography, Diffractive Optics, and Applications IV - Fabrication of microstructures on silicon by multiple beam holographic method using nanosecond laser pulses
Zhang, Heng, Sheng, Yunlong, Yu, Chongxiu, Fang, Zongbao, Chen, Linsen, Chen, LinsenVolume:
7848
Year:
2010
Language:
english
DOI:
10.1117/12.870325
File:
PDF, 5.63 MB
english, 2010