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Growth and Properties of CVD Ti–P–O Films Obtained from the CO[sub 2]∕H[sub 2]-Added and CO[sub 2]∕H[sub 2]-Free Systems
Kuo, Dong-Hau, Tseng, Wen-ChengVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2018527
File:
PDF, 216 KB
english, 2005