Effect of Surfactant as Additive in Wet Clean Solutions on...

Electrochemical and Solid-State Letters 2006 Vol. 9; Iss. 4

Effect of Surfactant as Additive in Wet Clean Solutions on Properties of Low-k Materials

Le, Q. T., Jeannot, V., Baklanov, M. R., Vanderheyden, R., Boullart, W., Vanhaelemeersch, S.
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Volume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2167928
File:
PDF, 457 KB
english, 2006
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