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Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF
Gong, X., Lu, Q., Peng, Z.Volume:
6
Language:
english
Journal:
Advances in Mechanical Engineering
DOI:
10.1155/2014/981631
Date:
February, 2015
File:
PDF, 21.20 MB
english, 2015