Structure Design and Numerical Simulation of a High...

Advances in Mechanical Engineering 2015 / 02 Vol. 6

Structure Design and Numerical Simulation of a High Performance Slit in Soft X-Ray Interference Lithography Beamline at SSRF

Gong, X., Lu, Q., Peng, Z.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Language:
english
Journal:
Advances in Mechanical Engineering
DOI:
10.1155/2014/981631
Date:
February, 2015
File:
PDF, 21.20 MB
english, 2015
Conversion to is in progress
Conversion to is failed