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Molecular Transfer Printing of Block Copolymer Patterns over Large Areas with Conformal Layers
Inoue, Takejiro, Janes, Dustin W., Ren, Jiaxing, Suh, Hyo Seon, Chen, Xuanxuan, Ellison, Christopher J., Nealey, Paul F.Volume:
2
Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201500133
Date:
July, 2015
File:
PDF, 2.04 MB
english, 2015