Fluidized-Bed Chemical Vapor Deposition of Silicon on Very...

Fluidized-Bed Chemical Vapor Deposition of Silicon on Very Dense Tungsten Powder

Vanni, Florence, Montaigu, Mélanie, Caussat, Brigitte, Ablitzer, Carine, Iltis, Xavière, Brothier, Méryl
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Volume:
38
Language:
english
Journal:
Chemical Engineering & Technology
DOI:
10.1002/ceat.201400350
Date:
July, 2015
File:
PDF, 736 KB
english, 2015
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