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Method of Shortening Settling Time Using Final State Control for High-Precision Stage with Decouplable Structure of Fine and Coarse Parts
YAZAKI, YUMA, FUJIMOTO, HIROSHI, HORI, YOICHI, SAKATA, KOICHI, HARA, ATSUSHI, SAIKI, KAZUAKIVolume:
195
Language:
english
Journal:
Electrical Engineering in Japan
DOI:
10.1002/eej.22829
Date:
June, 2016
File:
PDF, 1.48 MB
english, 2016