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Photosensitive organosilicon polymers for microlithographic application
Inoue, Takashi, Sugiyama, Hisashi, Nate, Kazuo, Mizushima, AkikoVolume:
24
Language:
english
Journal:
Makromolekulare Chemie. Macromolecular Symposia
DOI:
10.1002/masy.19890240119
Date:
January, 1989
File:
PDF, 420 KB
english, 1989