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Synthesis of Few-Layer Graphene-on-Insulator Films by Controllable C 4 F 8 Plasma Etching SiC
Jin, Chenggang, Huang, Tianyuan, Yang, Yan, Wu, Mingzhi, Xu, Yijun, Wu, Zhaofeng, Zhuge, Lanjian, Wu, Xuemei, Ye, ChaoVolume:
12
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201400181
Date:
October, 2015
File:
PDF, 1.17 MB
english, 2015