Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges
Hegemann, Dirk, Michlíček, Miroslav, Blanchard, Noémi E., Schütz, Urs, Lohmann, Dominik, Vandenbossche, Marianne, Zajíčková, Lenka, Drábik, MartinVolume:
13
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201500078
Date:
February, 2016
File:
PDF, 732 KB
english, 2016