Nitrogen Radical and Plasma Diagnostics in Dual Frequency Hybrid Plasmas to Investigate N 2 /SiH 4 PECVD Process
Sahu, Bibhuti Bhusan, Han, Jeon Geon, Shin, Kyung Sik, Hori, MasaruVolume:
13
Language:
english
Journal:
Plasma Processes and Polymers
DOI:
10.1002/ppap.201500116
Date:
April, 2016
File:
PDF, 1.38 MB
english, 2016